关键词:
gallium oxide
E-mode
device simulation
threshold voltage
摘要:
A novel enhanced mode(E-mode)Ga_(2)O_(3) metal-oxide-semiconductor field-effect transistor(MOSFET)with vertical FINFET structure is proposed and the characteristics of that device are numerically *** is found that the concentration of the source region and the width coupled with the height of the channel mainly effect the on-state *** metal material of the gate,the oxide material,the oxide thickness,and the epitaxial layer concentration strongly affect the threshold voltage and the output *** an E-mode MOSFET device requires a large work function gate metal and an oxide with large dielectric *** the output current density of the device increases,the source concentration,the thickness of the epitaxial layer,and the total width of the device need to be *** threshold voltage decreases with the increase of the width of the channel area under the same gate *** is indicated that a set of optimal parameters of a practical vertical enhancement-mode Ga_(2)O_(3) MOSFET requires the epitaxial layer concentration,the channel height of the device,the thickness of the source region,and the oxide thickness of the device should be less than 5×10^(16) cm^(-3),less than 1.5μm,between 0.1μm-0.3μm and less than 0.08μm,respectively.